Ultra-thin Piezoelectric Micro Pump

· MEMS-diaphragm piezoelectric drive · No rotating parts · Ultra-low thickness profile · For humanoid robot thermal management / AGV battery pack cooling / collaborative robot wrist joint micro-cooling

Product Information

• Supplier Qualification: ISO 9001:2015 audited · In-house MEMS diaphragm processing & sealing reliability test · 100% flow rate & leakage test per unit
• Technical Specification: Flow rate 5–50 mL/min · Operating pressure 10–80 kPa · Thickness 1–5 mm · Lifespan ≥10,000 hours · Operating temperature 0–60 ℃
• Available Documents: CE / RoHS / FCC Part 15B SDoC test report / IEC 60204-1 & IEC 61000-4 test reports / Flow Rate Calibration Report / EN 10204 3.1 (+UL / EAC / KC per destination)